Diamond tips and cantilevers for the characterization of...

Diamond and Related Materials 1999 / 3 Vol. 8; Iss. 2-5

Diamond tips and cantilevers for the characterization of semiconductor devices

Malavé, A, Oesterschulze, E, Kulisch, W, Trenkler, T, Hantschel, T, Vandervorst, W
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Volume:
8
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(98)00388-4
Date:
March, 1999
File:
PDF, 272 KB
english, 1999
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