Laser processing of silicon at submicron scale using...

Laser processing of silicon at submicron scale using photochromic films

CHEN, Q
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Volume:
230
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/S0169-4332(04)00231-4
Date:
May, 2004
File:
PDF, 214 KB
english, 2004
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