Fluorinated a-C:H films investigated by thermal-induced gas effusion
Jacobsohn, L.G, Camargo, S.S, Freire, F.LVolume:
11
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(02)00167-X
Date:
November, 2002
File:
PDF, 125 KB
english, 2002