Properties of the fluorinated coatings based on carbon prepared by RF-magnetron deposition
Sleptsov, V.V., Elinson, V.M., Simakina, N.V., Uksusov, A.S.Volume:
1
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(92)90162-H
Date:
April, 1992
File:
PDF, 169 KB
english, 1992