A Calculation Method of Deposition Profiles in CVD Reactors...

Physics Procedia 2013 Vol. 46

A Calculation Method of Deposition Profiles in CVD Reactors Using Genetic Algorithms

Takahashi, Takahiro, Kawamura, Ken, Takahashi, Kazuya, Ema, Yoshinori
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Volume:
46
Year:
2013
Language:
english
Journal:
Physics Procedia
DOI:
10.1016/j.phpro.2013.07.058
File:
PDF, 260 KB
english, 2013
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