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Off-axis growth of AlN thin films by hollow cathode magnetron sputtering under various nitrogen concentrations
Pessoa, R.S., Murakami, G., Massi, M., Maciel, H.S., Grigorov, K., da Silva Sobrinho, A.S., Petraconi, G., Marcuzzo, J.S.Volume:
16
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2006.11.030
Date:
April, 2007
File:
PDF, 636 KB
english, 2007