A study on structural, optical and hydrophobic properties of oblique angle sputter deposited HfO2 films
Jain, Ravish K., Gautam, Yogendra K., Dave, Vikramaditya, Chawla, Amit K., Chandra, RameshVolume:
283
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.06.112
Date:
October, 2013
File:
PDF, 2.76 MB
english, 2013