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Simple e-beam air-bridge technology for mm-wave applications
Khalid, Ata, Li, Chong, Grant, James, Saha, Shimul, Ferguson, Susan, Cumming, David R.S.Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.06.006
Date:
October, 2012
File:
PDF, 712 KB
english, 2012