Modeling of nitrogen/diborane/methane/hydrogen plasma for nanocrystalline diamond growth: Comparison with experimental data
Liang, Qi, Harrison, Joseph G., Vohra, Yogesh K.Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2008.07.001
Date:
December, 2008
File:
PDF, 458 KB
english, 2008