Langmuir probe measurements of electron temperature in an...

Langmuir probe measurements of electron temperature in an inductively coupled plasma

Pei-Qi, Lu, Pei-Zhong, Gong, Tie-Zheng, Lin, Houk, R.S.
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Volume:
43
Year:
1988
Language:
english
DOI:
10.1016/0584-8547(88)80053-3
File:
PDF, 983 KB
english, 1988
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