Deposition of DLC films in and r.f. plasmas

Diamond and Related Materials 1996 / 7 Vol. 5; Iss. 9

Deposition of DLC films in and r.f. plasmas

Mutsukura, Nobuki, Yoshida, Katsu-ichi
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Volume:
5
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(95)00495-5
Date:
July, 1996
File:
PDF, 404 KB
english, 1996
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