Investigation of diamond deposition uniformity and quality for freestanding film and substrate applications
Zuo, S.S., Yaran, M.K., Grotjohn, T.A., Reinhard, D.K., Asmussen, J.Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2007.12.069
Date:
March, 2008
File:
PDF, 794 KB
english, 2008