Submicron characterization of B-C:H thin films produced by...

Diamond and Related Materials 1992 / 3 Vol. 1; Iss. 2-4

Submicron characterization of B-C:H thin films produced by RF plasma CVD

Garci´a, A., Bellido, V., Flan˜o, N., On˜ate, J.I.
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Volume:
1
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(92)90056-T
Date:
March, 1992
File:
PDF, 816 KB
english, 1992
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