Observation of source gas depletion in narrow metal tube...

Diamond and Related Materials 2013 / 1 Vol. 31

Observation of source gas depletion in narrow metal tube during internal diamond-like carbon coating with microwaves

Matsui, Ryosuke, Mori, Kazunori, Kousaka, Hiroyuki, Umehara, Noritsugu
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Volume:
31
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2012.11.003
Date:
January, 2013
File:
PDF, 1.34 MB
english, 2013
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