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Experimental study on formability of bulk metallic glass as mold for microstructure replication
Mei, Lin, Liu, Jingbei, Huang, Yongjiang, Lin, Jie, Shen, Jun, Tan, Jiubin, Jin, PengVolume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.065
Date:
October, 2012
File:
PDF, 769 KB
english, 2012