Electrical and optical properties of CH4/H2 RF plasmas for...

Diamond and Related Materials 2005 / 3 Vol. 14; Iss. 3-7

Electrical and optical properties of CH4/H2 RF plasmas for diamond-like thin film deposition

Amanatides, E., Mataras, D.
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Volume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2004.11.008
Date:
March, 2005
File:
PDF, 222 KB
english, 2005
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