![](/img/cover-not-exists.png)
Electrical and optical properties of CH4/H2 RF plasmas for diamond-like thin film deposition
Amanatides, E., Mataras, D.Volume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2004.11.008
Date:
March, 2005
File:
PDF, 222 KB
english, 2005