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Scatterometry analysis of sequentially imprinted patterns: Influence of thermal parameters
Gourgon, C., Ferchichi, A.K., Pietroy, D., Haatainen, T., Tesseire, J.Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.05.048
Date:
October, 2012
File:
PDF, 704 KB
english, 2012