Micromachined membrane structures for pressure sensors...

Microelectronic Engineering 2012 / 10 Vol. 98

Micromachined membrane structures for pressure sensors based on AlGaN/GaN circular HEMT sensing device

Lalinský, T., Hudek, P., Vanko, G., Dzuba, J., Kutiš, V., Srnánek, R., Choleva, P., Vallo, M., Držík, M., Matay, L., Kostič, I.
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.06.014
Date:
October, 2012
File:
PDF, 383 KB
english, 2012
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