Thickness distribution of gas phase coatings in confined...

Surface and Coatings Technology 2004 / 03 Vol. 180-181

Thickness distribution of gas phase coatings in confined channels

GRYTSENKO, K
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Volume:
180-181
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/S0257-8972(03)01240-4
Date:
March, 2004
File:
PDF, 90 KB
english, 2004
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