Influence of the sputtering gas composition on the...

Diamond and Related Materials 1998 / 8 Vol. 7; Iss. 8

Influence of the sputtering gas composition on the properties of thin boron nitride thin films

Méndez, Juan Manuel, Ramı́rez, Efrén, Gaona-Couto, Adriana
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Volume:
7
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(98)00173-3
Date:
August, 1998
File:
PDF, 214 KB
english, 1998
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