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Experimental data vs. 3-D model calculations of HFCVD processes: correlations and discrepancies
Mankelevich, Yu.A., Suetin, N.V., Ashfold, M.N.R., Smith, J.A., Cameron, E.Volume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00419-2
Date:
March, 2001
File:
PDF, 146 KB
english, 2001