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Deposition of dense C:H films at elevated substrate temperature
von Keudell, A., Möller, W., Hytry, R.Volume:
2
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(93)90063-8
Date:
March, 1993
File:
PDF, 333 KB
english, 1993