Effects of titanium and aluminum incorporations on the...

Diamond and Related Materials 1999 / 3 Vol. 8; Iss. 2-5

Effects of titanium and aluminum incorporations on the structure of boron nitride thin films

Kolitsch, A, Wang, X, Manova, D, Fukarek, W, Möller, W, Oswald, S
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Volume:
8
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(98)00304-5
Date:
March, 1999
File:
PDF, 260 KB
english, 1999
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