Preparation of amorphous Ga–Sn–Zn–O semiconductor thin...

Materials Science and Engineering: B 2014 / 04 Vol. 183

Preparation of amorphous Ga–Sn–Zn–O semiconductor thin films by RF-sputtering method

Liang, Chih-Hao, Chau, Joseph Lik Hang, Yang, Chih-Chao, Shih, Hsi-Hsin
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Volume:
183
Language:
english
Journal:
Materials Science and Engineering: B
DOI:
10.1016/j.mseb.2013.12.003
Date:
April, 2014
File:
PDF, 5.17 MB
english, 2014
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