Inspecting the surface of implanted Si(111) during...

Thin Solid Films 2013 / 2 Vol. 529

Inspecting the surface of implanted Si(111) during annealing by reflective second harmonic generation: The influence of chamber pressure

Liu, Chung-Wei, Chang, Shoou-Jinn, Liu, Chun-Chu, Lo, Kuang-Yao
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Volume:
529
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2012.05.047
Date:
February, 2013
File:
PDF, 1.07 MB
english, 2013
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