Optimized process of metal assisted silicon wet etching for...

Microelectronic Engineering 2012 / 10 Vol. 98

Optimized process of metal assisted silicon wet etching for antireflection layer

Kim, Bo-soon, Ju, Won-Ki, Lee, Min-Woo, Lee, Seung-Gol, O, Beom-Hoan
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.05.040
Date:
October, 2012
File:
PDF, 1.13 MB
english, 2012
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