![](/img/cover-not-exists.png)
Measurement of the temperature coefficient of Young's modulus of single crystal silicon and 3C silicon carbide below 273K using micro-cantilevers
Boyd, Euan J., Li, Li, Blue, Robert, Uttamchandani, DeepakVolume:
198
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.04.032
Date:
August, 2013
File:
PDF, 1.12 MB
english, 2013