Preparation of SiNB films by CVD techniques: effect of SiH4...

Diamond and Related Materials 1996 / 4 Vol. 5; Iss. 3-5

Preparation of SiNB films by CVD techniques: effect of SiH4 addition to B2H6 and NH3 gas mixtures

Essafti, A., Go´mez-Aleixandre, C., Albella, J.M.
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Volume:
5
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(95)00465-3
Date:
April, 1996
File:
PDF, 453 KB
english, 1996
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