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Laser profilometer using a Fabry–Perot etalon and an objective
Lin, Shyh-Tsong, Yeh, Sheng-Lih, Wang, Yi-Chun, Chen, Meng-ZhuVolume:
203
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.08.001
Date:
December, 2013
File:
PDF, 1.38 MB
english, 2013