Influences of repetition rate of laser pulses on growth of...

Influences of repetition rate of laser pulses on growth of crystalline AlN films on sapphire(0001) substrates by pulsed laser deposition

Sumitani, Kazushi, Ohtani, Ryota, Yoshida, Tomohiro, Nakagawa, You, Mohri, Satoshi, Yoshitake, Tsuyoshi
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Volume:
19
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2009.12.004
Date:
May, 2010
File:
PDF, 308 KB
english, 2010
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