Preferential etching of SiC crystals

Diamond and Related Materials 1997 / 8 Vol. 6; Iss. 10

Preferential etching of SiC crystals

Yakimova, R., Hylén, A.-L., Tuominen, M., Syväjärvi, M., Janzén, E.
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Volume:
6
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00076-9
Date:
August, 1997
File:
PDF, 1.01 MB
english, 1997
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