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Anodic oxidation as sectioning technique for the analysis of impurity concentration profiles in silicon
A. Manara, A. Ostidich, G. Pedroli, G. RestelliVolume:
8
Year:
1971
Language:
english
Pages:
17
DOI:
10.1016/0040-6090(71)90084-8
File:
PDF, 720 KB
english, 1971