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Characterization of nitrogen-doped a-C:H films deposited by cathodic-arc activated deposition process
Chang, Yin-Yu, Wang, Da-Yung, Wu, WeiTeVolume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(03)00290-5
Date:
October, 2003
File:
PDF, 643 KB
english, 2003