The use of silane silicon dioxide films to contour oxide...

Thin Solid Films 1972 Vol. 9; Iss. 3

The use of silane silicon dioxide films to contour oxide edges

Lou H. Hall, D.Lloyd Crosthwait
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Volume:
9
Year:
1972
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(72)90132-0
File:
PDF, 739 KB
english, 1972
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