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A new method for the evaluation of the surface condition of aluminum yielding new insight into IC multilevel interconnection problems
J.P. Rioult, G. HurstVolume:
10
Year:
1972
Language:
english
Pages:
18
DOI:
10.1016/0040-6090(72)90195-2
File:
PDF, 1.05 MB
english, 1972