SiGe MEMS Accelerometers Combining a Large Bandwidth with a High Capacitive Sensitivity
Chaudhuri, A. Ray, Severi, S., Erismis, M.A., Francis, L.A., Witvrouw, A.Volume:
47
Year:
2012
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2012.09.254
File:
PDF, 630 KB
english, 2012