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Determination of film thickness and refractive index of films and substrates by means of angular modulation in reflection
A. Konova, M. Borissov, K. DaskalovVolume:
27
Year:
1975
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(75)90008-5
File:
PDF, 231 KB
english, 1975