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The effect of growth conditions on the structural and electrical properties of the SiGe heteroepitaxial system
V.N. Vasilevskaja, R.V. Konakova, N.V. Osadchaja, Yu.A. Tkhorik, M.Yu. Philatov, Yu.M. SchwarzVolume:
30
Year:
1975
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(75)90308-9
File:
PDF, 897 KB
english, 1975