Effect of target oxidation on reactive sputtering rates of...

Thin Solid Films 1976 Vol. 38; Iss. 3

Effect of target oxidation on reactive sputtering rates of titanium in argon-oxygen plasmas

Lee F. Donaghey, Kenneth G. Geraghty
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Volume:
38
Year:
1976
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(76)90006-7
File:
PDF, 534 KB
english, 1976
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