Nanocrystalline SiC layers produced by ion-beam-induced...

Diamond and Related Materials 2003 / 3 Vol. 12; Iss. 3-7

Nanocrystalline SiC layers produced by ion-beam-induced crystallization—morphology and resistivity

Heera, V., Madhusoodanan, K.N., Mücklich, A., Skorupa, W.
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Volume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(02)00221-2
Date:
March, 2003
File:
PDF, 474 KB
english, 2003
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