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Reactive sputtering of indium targets in a D.C. triode configuration
G. Bomchil, F. Buiguez, A. Monfret, S. GalzinVolume:
47
Year:
1977
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(77)90038-4
File:
PDF, 296 KB
english, 1977