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Preparation of β-SiC films by r.f. sputtering
Shigehiro Nishino, Hiroyuki Matsunami, Masanori Odaka, Tetsuro TanakaVolume:
40
Year:
1977
Language:
english
Pages:
1
DOI:
10.1016/0040-6090(77)90096-7
File:
PDF, 549 KB
english, 1977