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Studies of the Ti-W/Au metallization on aluminum
R.S. Nowicki, J.M. Harris, M.-A. Nicolet, I.V. MitchellVolume:
53
Year:
1978
Language:
english
Pages:
11
DOI:
10.1016/0040-6090(78)90035-4
File:
PDF, 2.09 MB
english, 1978