Kinetics and properties of chemically vapour-deposited...

Thin Solid Films 1978 Vol. 52; Iss. 2

Kinetics and properties of chemically vapour-deposited tungsten films on silicon substrates

Constantin-Eugen Morosanu, Valerian Soltuz
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
52
Year:
1978
Language:
english
Pages:
14
DOI:
10.1016/0040-6090(78)90137-2
File:
PDF, 1.08 MB
english, 1978
Conversion to is in progress
Conversion to is failed