Observations of Al2O3 and free silicon at the interface between aluminum films and SiO2
Y.E. Strausser, E.J. Scheibner, J.S. JohannessenVolume:
52
Year:
1978
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(78)90139-6
File:
PDF, 574 KB
english, 1978