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Hard amorphous hydrogenated carbon-nitrogen films obtained by PECVD in methane-ammonia atmospheres
Franceschini, D.F., Freire, F.L., Achete, C.A., Mariotto, G.Volume:
5
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(96)80061-6
Date:
April, 1996
File:
PDF, 455 KB
english, 1996