Formation of thick titanium carbide films by the hollow cathode discharge reactive deposition process
Souji Komiya, Nobuo Umezu, Tadashi NarusawaVolume:
54
Year:
1978
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(78)90276-6
File:
PDF, 438 KB
english, 1978