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Growth of phosphorus-doped diamond using tertiarybutylphosphine and trimethylphosphine as dopant gases
Kato, Hiromitsu, Futako, Wataru, Yamasaki, Satoshi, Okushi, HideyoVolume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2004.11.032
Date:
March, 2005
File:
PDF, 130 KB
english, 2005