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Properties of TiNxfilms reactively sputtered in an argon-nitrogen atmosphere
Witold Posadowski, Lubomiła Król-Stȩpniewska, Zbigniew ZiołowskiVolume:
62
Year:
1979
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(79)90009-9
File:
PDF, 235 KB
english, 1979