Properties and coating rates of diamond-like carbon films produced by R.F. glow discharge of hydrocarbon gases
L.P. Andersson, S. Berg, H. Norström, R. Olaison, S. TowtaVolume:
63
Year:
1979
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(79)90117-2
File:
PDF, 307 KB
english, 1979